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Solarius - 3D Metrology - Atlas


Solarius - 3D Metrology - Atlas

EASE OF USE and RELIABILITY make Atlas a remarkable tool for FAST and ACCURATE surface measurement

The Atlas 3D metrology tool is a modular surface measurement system for quality assurance and process control. Depending on specific needs, different types of 3D sensor technologies can be configured, making it a flexibel tool that allows accurate results at a broad variety of 3D measuring requirements, materials and geometries. Its software supports automation and efficiency in a production environment. Interferometric 3D sensors allow high speed measurements with up to 80,000 points in as few as 130 milliseconds at lateral resolutions down to 4 µm. 

Key Features: 

  • Customized recipes, easy to automate 
  • Ultra-fast measurements 
  • Wide variety of sensor selections 
  • Large lateral measurement range 
  • Flexible data analysis tools 

Sensor Types: 

  • Chromatic confocal point sensors 
  • Chromatic confocal line sensors 
  • White light interferometric sensors 
  • Line triangulation sensors 

Using sensors with point confocal, line confocal, interferometric or line triangulation technology, its height resolution ranges from 1 nm to 200 µm. The Atlas software solution combines two software tools: a measurement recipe creation tool and a flexible analysis tool. This unique combination is ideal for applications in research and development, failure analysis, and low-volume semi-automated measurement. 

Lateral Working Range

up to 400 mm x 400 mm

Vertical Working Range

100 µm to 80 mm

Lateral Resolution

1 µm up

Vertical Resolution

1 nm up


For further details, please refer to enclosed brochure.

Solarius is a leading provider of precision systems for non-contact surface inspection, measurement, analysis, and visualization. Our products combine high-resolution sensors with automated data acquisition systems and powerful analysis tools.  Augmented by our international partner network Solarius takes care of an installed base exceeding 2,000 active metrology systems worldwide.

For more information, please contact us:

Hotline: 0906 654 815


0906 654 815